AIR DISTRIBUTION IN CLEAN ROOMS

Low-turbulence laminar flow (LF) is characterised by an evenvelocity profile and almost parallel flow lines across the entire cross selection of the clean area. With LF, maximum air cleanliness classes can be achieved – even in large clean air areas.

Low-turbulence laminar flow is used where products and processes are particularly sensitive and need to be protected from contamination. Here, the recirculation and/or exhaust air is extracted close to the ground.

A special feature of microelectronics is that the recirculation and/or exhaust air is extracted via a raised floor so as not to influencethe laminar flow near the ground.

Turbulent flow means that the primary air mixes with the induced room air. Clean air is not supplied across the entire room but only at selected points, typically through ceiling swirl diffusers. The high induction causes good mixing of the room air and flooding of the clean air area.

The turbulence flow combines final HEPA filters with a swirl diffuser. The recirculation and/or exhaust air is usually extracted close to the ground.

Directional flow is particularly suitable for separating clean areas from impure or less clean areas. The Here, the discharge pattern runs across the room from one side to the other.. This can be across the wall surface across the room or from one side up to the other side down.

Directional flow is used where a transfer of particles from one area to another area is to be prevented. Ideal for airlocks between two cleanliness zones.